Thermo Scientific™ SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
Brand: Thermo Scientific™ PD1100B
Additional Details : Weight : 0.21600kg
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
|Polystyrene microspheres in deionized, filtered water|
|Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.|
|SSIS Calibration and Maintenance|
|1 x 10¹° particles/mL|
|Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).|
|Certificate of Calibration and Traceability to NIST|
|1.59 at 589nm (25°C)|
|Product stable for a minimum of 12 months|
|Size Standard Particles|